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VIT(E) Series
<p>Virtual Interface Technology for 3D-IC Metrology: TSV profile (depth, top & bottom CD) , Remaining Silicon Thickness (RST), Copper Nail Height, Bump Height and Cu pillar Height, Edge trim profile.</p>
Models:
VIT C2C
|
8108 VITE
|
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128 Series
413 Series
500 Series
900 Series
Adhesion Testers
Electrical Characterization
Raman 360 and FSM127
VIT(E) Series
Application
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3DIC TSV Process Control
Electrical Characterization
Film Adhesion
Film Stress
Laser Scanning
Low Coherence Interferometry
Raman Spectroscopy
Thin wafer metrology
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